LPV control of a wafer stage: beyond the theoretical solution
Journal Article
(2005)
Author(s)
MB Groot Wassink (TU Delft - DISC)
MMJ van de Wal (External organisation)
C.W. Scherer (TU Delft - DISC)
OH Bosgra (TU Delft - DISC)
Research Group
DISC
DOI related publication
https://doi.org/doi:10.1016/j.conengprac.2004.03.008
To reference this document use:
https://resolver.tudelft.nl/uuid:9b774260-083e-40e6-90a7-6e8d16747ab1
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Publication Year
2005
Research Group
DISC
Issue number
2
Volume number
13
Pages (from-to)
231-245
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