LPV control of a wafer stage: beyond the theoretical solution

Journal article (2005)

Authors

MB Groot Wassink DISC - Mechanical, Maritime and Materials Engineering

MMJ van de Wal External organisation

C.W. Scherer DISC - Mechanical, Maritime and Materials Engineering

O.H. Bosgra DISC - Mechanical, Maritime and Materials Engineering

Research Group

DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2005

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC