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MMJ van de Wal
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3 records found
Multi-objective HOO control applied to a wafer stage model
Conference paper -
M.J. Zandvliet
,
C.W. Scherer
,
CWJ Hol
,
MMJ van de Wal
LPV identification of high performance positioning devices
Conference paper -
R. Toth
,
MMJ van de Wal
,
P.S.C. Heuberger
,
P.M.J. van den Hof
LPV control of a wafer stage: beyond the theoretical solution
Journal article -
MB Groot Wassink
,
MMJ van de Wal
,
C.W. Scherer
,
O.H. Bosgra