Multi-objective HOO control applied to a wafer stage model
Conference Paper
(2004)
Author(s)
M.J. Zandvliet (TU Delft - DISC)
Carsten Scherer (TU Delft - DISC)
CWJ Hol (TU Delft - DISC)
MMJ van de Wal (External organisation)
Research Group
DISC
To reference this document use:
https://resolver.tudelft.nl/uuid:c686ed52-30fd-437c-8aad-33bd5abd72a3
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Publication Year
2004
Research Group
DISC
Pages (from-to)
796-802
ISBN (print)
0-7803-8682-5
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