Multi-objective HOO control applied to a wafer stage model

Conference paper (2004)

Authors

M.J. Zandvliet DISC - Mechanical, Maritime and Materials Engineering

C.W. Scherer DISC - Mechanical, Maritime and Materials Engineering

CWJ Hol DISC - Mechanical, Maritime and Materials Engineering

MMJ van de Wal External organisation

Research Group

DISC (Mechanical, Maritime and Materials Engineering) (TU Delft)

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Published Date

2004

Language

Undefined/Unknown

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Delft Center for Systems and Control

Research Group

DISC