Focused electron beam induced processing and the effect of substrate thickness revisited

Journal article (2013)

Authors

W.F. van Dorp ImPhys/Charged Particle Optics
A Beyer External organisation
M Mainka External organisation
A Gölzhäuser External organisation
TW Hansen External organisation
JB Wagner External organisation
C.W. Hagen ImPhys/Charged Particle Optics
JTM de Hosson External organisation
Research Group
ImPhys/Charged Particle Optics
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Published Date

2013

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics