Focused electron beam induced processing and the effect of substrate thickness revisited
Journal Article
(2013)
Author(s)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
A Beyer (External organisation)
M Mainka (External organisation)
A Gölzhäuser (External organisation)
TW Hansen (External organisation)
JB Wagner (External organisation)
Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)
JTM De Hosson (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:9b7cafbb-0ee8-45e2-9502-fad42b0145b8
More Info
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Publication Year
2013
Research Group
ImPhys/Charged Particle Optics
Issue number
34
Volume number
24
Pages (from-to)
1-10
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