Focused electron beam induced processing and the effect of substrate thickness revisited

Journal Article (2013)
Author(s)

W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)

A Beyer (External organisation)

M Mainka (External organisation)

A Gölzhäuser (External organisation)

TW Hansen (External organisation)

JB Wagner (External organisation)

Kees Hagen (TU Delft - ImPhys/Charged Particle Optics)

JTM De Hosson (External organisation)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2013
Research Group
ImPhys/Charged Particle Optics
Issue number
34
Volume number
24
Pages (from-to)
1-10

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