Passive film thickness control in hydrodynamic lubrication on non-flat surfaces
D.J. Blommestein (TU Delft - Mechanical Engineering)
Ron Van Ostayen – Mentor (TU Delft - Mechatronic Systems Design)
J. Snieder – Mentor (TU Delft - Mechatronic Systems Design)
S.H. Hassan HosseinNia – Graduation committee member (TU Delft - Mechatronic Systems Design)
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Abstract
Nanoimprinting is a manufacturing method to replicate micro- and nanotextures on large-area substrates with ultraviolet-curable resins. Significant potential of large-area nanopatterning lies in its capacity to greatly enhance the performance of an abundance of devices and foster the creation of cutting-edge products. However, current large-area imprinting techniques require improvement in order to achieve high resolution, high throughput and cost-effectiveness, whilst imprinting in a thin uniform resin layer. This work presents the development of a demonstrator to passively control the film thickness in hydrodynamic lubrication on non-flat surfaces in nanoimprinting lithography.
Using low stiffness actuation, it was expected that film thickness uniformity increases during imprinting. In this project a functioning demonstrator is realised, where the film height under a slider bearing is passively controlled. The slider bearing behaviour has been tested on various flat and non-flat surfaces. Film heights of 80-160 micrometer were realised on non-flat substrates of 800 micrometer.