Resolution improvement in Low Voltage SEM with FEG monochromator.
Report
(1999)
Author(s)
HW Mook (TU Delft - ImPhys/Charged Particle Optics)
JE Barth (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
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https://resolver.tudelft.nl/uuid:9c99c015-01a4-4ecb-9c79-8f8a0643b8dd
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Publication Year
1999
Research Group
ImPhys/Charged Particle Optics
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