14×14 beams in a scanning electron microscope
A. Mohammadi Gheidari (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)
P. Kruit (TU Delft - ImPhys/Microscopy Instrumentation & Techniques)
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Abstract
In this paper, the multi-beam source (MBS) unite is analyzed and the experimental results are presented. The basic concept in the MBS is that the broad beam of a high brightness Schottky source is split up into multiple sub-beams by an aperture array (AA). The AA is a silicon wafer with 100 holes and together with two macro electrodes acts as an aperture lens array (ALA) to focus each beam individually on to the blanker array (BA).