Solid-phase epitaxial growth of (III)-oriented Si film on InGaO3(ZnO)5 buffer layer
Journal Article
(2010)
Author(s)
T Chen (TU Delft - Electronic Components, Technology and Materials)
M. Wu (TU Delft - QN/High Resolution Electron Microscopy)
R Ishihara (TU Delft - Electronic Components, Technology and Materials)
K Nomura (External organisation)
T Kamiya (External organisation)
H Hosono (External organisation)
Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1007/s10854-010-0237-1
To reference this document use:
https://resolver.tudelft.nl/uuid:9e9f80e2-d3ad-4c1a-ba53-926cc6e33028
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
2010
Pages (from-to)
1-4
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