Solid-phase epitaxial growth of (III)-oriented Si film on InGaO3(ZnO)5 buffer layer

Journal Article (2010)
Author(s)

T Chen (TU Delft - Electronic Components, Technology and Materials)

M. Wu (TU Delft - QN/High Resolution Electron Microscopy)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

K Nomura (External organisation)

T Kamiya (External organisation)

H Hosono (External organisation)

Kees Beenakker (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1007/s10854-010-0237-1
More Info
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Publication Year
2010
Language
English
Research Group
Electronic Components, Technology and Materials
Volume number
2010
Pages (from-to)
1-4

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