Solid-phase epitaxial growth of (III)-oriented Si film on InGaO3(ZnO)5 buffer layer

Chen, T; Wu, M.; Ishihara, R.; Nomura, K; Kamiya, T; Hosono, H; Beenakker, C.I.M.

Solid-phase epitaxial growth of (III)-oriented Si film on InGaO3(ZnO)5 buffer layer

Journal article (2010)

Authors

T Chen Electronic Components, Technology and Materials -

M. Wu QN/High Resolution Electron Microscopy

R. Ishihara Electronic Components, Technology and Materials -

K Nomura External organisation

T Kamiya External organisation

H Hosono External organisation

C.I.M. Beenakker Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

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Published Date

2010

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials