Low temperature, 400 °C, pure boron deposition: A solution for integration of high-performance Si photodetectors and CMOS circuits
Conference Paper
(2015)
Author(s)
V. Mohammadi (TU Delft - Electronic Components, Technology and Materials)
Stoyan Nihtianova (TU Delft - Electronic Instrumentation)
Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICSENS.2015.7370555
To reference this document use:
https://resolver.tudelft.nl/uuid:9ebdc7c2-ef20-4d53-a2ba-910a82ff0294
More Info
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Publication Year
2015
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
ISBN (print)
978-1-4799-8202-8
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