Low temperature, 400 °C, pure boron deposition: A solution for integration of high-performance Si photodetectors and CMOS circuits

Conference Paper (2015)
Author(s)

V. Mohammadi (TU Delft - Electronic Components, Technology and Materials)

Stoyan Nihtianova (TU Delft - Electronic Instrumentation)

Research Group
Electronic Components, Technology and Materials
DOI related publication
https://doi.org/10.1109/ICSENS.2015.7370555
More Info
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Publication Year
2015
Language
English
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
1-4
ISBN (print)
978-1-4799-8202-8

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