On the influence of the sputtering in determining the resolution of a Scanning Ion Microscope

Journal Article (2009)
Author(s)

V Castaldo (TU Delft - ImPhys/Charged Particle Optics)

C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)

Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)

E van Veldhoven (External organisation)

D Maas (External organisation)

Research Group
ImPhys/Charged Particle Optics
More Info
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Publication Year
2009
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
27
Pages (from-to)
3196-3202

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