On the influence of the sputtering in determining the resolution of a Scanning Ion Microscope

Journal article (2009)

Authors

V Castaldo ImPhys/Charged Particle Optics
C.W. Hagen ImPhys/Charged Particle Optics
P. Kruit ImPhys/Charged Particle Optics
E van Veldhoven External organisation
D Maas External organisation
Research Group
ImPhys/Charged Particle Optics
More Info
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Published Date

2009

Language

Undefined/Unknown

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Research Group

ImPhys/Charged Particle Optics