On the influence of the sputtering in determining the resolution of a Scanning Ion Microscope
Journal Article
(2009)
Author(s)
V Castaldo (TU Delft - ImPhys/Charged Particle Optics)
C.W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
Pieter Kruit (TU Delft - ImPhys/Charged Particle Optics)
E van Veldhoven (External organisation)
D Maas (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:9f3d162f-506a-475e-ae75-9b11ac22234b
More Info
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Publication Year
2009
Research Group
ImPhys/Charged Particle Optics
Issue number
6
Volume number
27
Pages (from-to)
3196-3202
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