MEMS-Based Design for Single-Pulsed High-Pressure Ultrasound System via Acoustic Amplification Through Acoustic Energy Storage and Release

Abstract

Emerging biomedical ultrasound applications such as pulsed neurostimulation and shear-wave imaging demand single-pulse focused ultrasound waves with MPa-range acoustic pressures. Achieving high pressures typically involves driving transducers with high voltages, necessitating bulky power amplifiers. Recently, phased arrays have emerged to miniaturize these focused transducers. However, they often exhibit poor power efficiency and heat dissipation. To address this, we explore acoustic amplification through acoustic energy storage and release, where, with minimal voltage, high-amplitude ultrasound waves are produced. Prior work has shown the principle using bulky apparatus with limited applicability. In this work, we explore the theory and perform finite element modeling (FEM) to investigate this mechanism with miniaturized and micro-electro-mechanical systems (MEMS)-compatible materials and geometries.