Contact and alignment marker technology for atomic scale device fabrication
Journal Article
(1998)
Author(s)
M.R. Zuiddam (TU Delft - QN/Kavli Nanolab Delft)
S. Rogge (TU Delft - QN/Fysics of NanoElectronics)
LJ Geerlings (External organisation)
Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)
B Ilge (TU Delft - QN/Fysics of NanoElectronics)
G Palasantzas (TU Delft - Old organisation TN/TechnischeNatuurkunde voorm)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:a10e8fc8-0ec5-419c-82c2-2e5b454caa74
More Info
expand_more
expand_more
Publication Year
1998
Research Group
QN/Kavli Nanolab Delft
Volume number
41-42
Pages (from-to)
567-570
No files available
Metadata only record. There are no files for this record.