Measured thermal modes for design optimization

Conference paper (2012)

Authors

E.C. Hooijkamp Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
R. Saathof Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
A. van Keulen Computational Design and Mechanics - Mechanical, Maritime and Materials Engineering
J. van Eijk Mechatronic Systems Design - Mechanical, Maritime and Materials Engineering
Research Group
Computational Design and Mechanics (Mechanical, Maritime and Materials Engineering) (TU Delft)
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Published Date

2012

Language

English

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Faculty

Mechanical, Maritime and Materials Engineering

Department

Precision and Microsystems Engineering

Research Group

Computational Design and Mechanics

Abstract

Reduced thermomechanical models are needed for the next generation precision devices. One of the methods is thermal modal analysis, which decomposes the behaviour into thermal modes and time constants. This study aims to measure these modal parameters. We isolated the behaviour of a single thermal mode exciting the system in the test set-up by this mode. The measured responses as well as the modal contributions are in good agreement with the simulations. Thus, thermal modal analysis can provide a basis for design optimiztion and compensation strategies.