Evaluation of interferometric ellipsometer systems with a time resolution of one microsecond and faster.
Journal Article
(1998)
Author(s)
K Hemmes (TU Delft - OLD Surface and Interface Engineering)
A Hamstra (External organisation)
KR Koops (External organisation)
MM Wind (External organisation)
T Schram (External organisation)
J de Laet (External organisation)
H Bender (External organisation)
Research Group
OLD Surface and Interface Engineering
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Publication Year
1998
Research Group
OLD Surface and Interface Engineering
Volume number
313
Pages (from-to)
40-46
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