Resetting Velocity Feedback: Reset Control for Active Damping
M.A. Mohan (TU Delft - Mechanical Engineering)
S. Hassan Hassan HosseinNia – Mentor (TU Delft - Mechatronic Systems Design)
M.B. Kaczmarek – Mentor (TU Delft - Mechatronic Systems Design)
Andres Hunt – Graduation committee member (TU Delft - Micro and Nano Engineering)
Matin Jafarian – Graduation committee member (TU Delft - Team Matin Jafarian)
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Abstract
As the age of digitization evolves rapidly, there is an ever-increasing demand for improving precision and decreasing production times for industrial automation in general, and semiconductor manufacturing in particular. As these complex machines incorporate flexure-based elements to overcome friction and backlash, structural vibrations pose a new challenge. Hence, the need for controlling and quickly damping these vibrations are paramount. In this thesis, a novel reset-based bandpass filter that employs velocity feedback to achieve finite-time vibration suppression for damped systems is introduced. The development of this filter stems from an energy based mechanistic approach, providing a clear understanding of the underlying mechanism for the improved transient response, which also motivates the use of reset. Systematic tuning rules based on describing functions are also developed to enable design in the frequency-domain, thereby increasing its relevance for industries. Finally, the effectiveness of the Resetting Velocity Feedback framework for improved transient damping is demonstrated experimentally on a single degree-of-freedom flexure stage. The results are compared to a linear bandpass filter and validates the advantages of reset control for achieving better transient damping compared to linear control.