Layer-by-layer deposition of thin silicon films from hydrogen diluted silane
Conference Paper
(2006)
Author(s)
G van Elzakker (TU Delft - Electronic Components, Technology and Materials)
Frans Tichelaar (QN/High Resolution Electron Microscopy)
M. Zeman (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:a48b5325-ae72-4595-aa6f-ea3d22988fdb
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Publication Year
2006
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
465-469
ISBN (print)
90-73461-44-8
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