Grain matrix made with excimer-laser crystallization of thin silicon films

Conference Paper (1999)
Author(s)

PC van der Wilt (TU Delft - Electronic Components, Technology and Materials)

R Ishihara (TU Delft - Electronic Components, Technology and Materials)

Research Group
Electronic Components, Technology and Materials
More Info
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
169-174
ISBN (print)
3-908450-43-8

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