High temperature CVD deposition of thin polycrystalline silicon layers
Conference Paper
(2001)
Author(s)
A Petit (External organisation)
M. Zeman (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
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https://resolver.tudelft.nl/uuid:a4cabaaf-70a2-4934-aea6-4ab328cdb29b
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Publication Year
2001
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
150-153
ISBN (print)
90-73461-29-4
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