Dry etching and induced damage
Journal Article
(1996)
Author(s)
EWJM van der Drift (TU Delft - QN/Kavli Nanolab Delft)
R Cheung (External organisation)
T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:a6480bff-9254-46a1-a686-c5f90e8752ca
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Publication Year
1996
Research Group
QN/Kavli Nanolab Delft
Volume number
32
Pages (from-to)
241-253
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