Electro-thermal analysis and design of a combined MEMS impedance and micro hotplate device for gas sensing applications

Conference paper (2016)

Authors

M. Ramachandrappa Venkatesh Electronic Components, Technology and Materials - , Beijing Research Center

B. el Mansouri Electronic Components, Technology and Materials -

J. Wei EKL Processing -

A. Bossche Electronic Instrumentation -

Kouchi Zhang Electronic Components, Technology and Materials -

Research Group

Electronic Components, Technology and Materials () (TU Delft)

Sensors Heating Electrodes Analytical models Capacitance Capacitors Micromechanical devices

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Published Date

05-05-2016

Language

English

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials

Abstract

In this paper, we present electro-thermal analysis and design of a combined MEMS micro hotplate and interdigitated-capacitance impedance sensor for gas sensing application using nano-porous materials like metal organic framework (MOF). The effects of design parameters of interdigitated electrodes such as width(W) and gap(G) of the capacitor, metallization ratio, number of electrodes and area of the capacitor. The influence of height of the electrode material, thickness of the insulation layer between the capacitance electrodes and the micro hotplate electrodes are studied. These design parameters are optimized to obtain a high bare capacitance of the electrodes using analytical and electric and thermal domain simulations in COMSOL 5. The design and thermal analysis of the micro hotplate for a temperature range of (150-300°C) and low power consumption is modelled and results are discussed.