Low temperature deposition of TiN by plasma-assisted atomic layer deposition for system-in-package applications
Conference Paper
(2005)
Author(s)
SBS Heil (External organisation)
E Langereis (External organisation)
F Roozeboom (External organisation)
P. M. Sarro (TU Delft - Electronic Components, Technology and Materials)
MCM van de Sanden (External organisation)
W. M.M. Kessels (External organisation)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:a9e9694a-8ac8-4e20-95db-0473918df1d4
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Publication Year
2005
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
92-95
ISBN (print)
90-73461-50-2
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