First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls
Conference Paper
(2014)
Author(s)
F. Buja (TU Delft - Micro and Nano Engineering)
J. Kokorian (TU Delft - Micro and Nano Engineering)
AV Sumant (Argonne National Laboratory)
Merlijn van Spengen (TU Delft - Micro and Nano Engineering)
Department
Precision and Microsystems Engineering
DOI related publication
https://doi.org/10.1109/NEMS.2014.6908763
To reference this document use:
https://resolver.tudelft.nl/uuid:aa1315f9-3435-4e89-b99b-c56920951f04
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Publication Year
2014
Language
English
Department
Precision and Microsystems Engineering
Pages (from-to)
77-80
ISBN (print)
978-1-4799-4727-0
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