First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls
Conference Paper
(2014)
Author(s)
F Buja (TU Delft - Mechanical Engineering)
J Kokorian (TU Delft - Mechanical Engineering)
AV Sumant (Argonne National Laboratory)
WM van Spengen (TU Delft - Mechanical Engineering)
Department
Precision and Microsystems Engineering
DOI related publication
https://doi.org/10.1109/NEMS.2014.6908763
Final published version
To reference this document use
https://resolver.tudelft.nl/uuid:aa1315f9-3435-4e89-b99b-c56920951f04
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Publication Year
2014
Language
English
Department
Precision and Microsystems Engineering
Bibliographical Note
Harvest
Pages (from-to)
77-80
Publisher
IEEE
ISBN (print)
978-1-4799-4727-0
Event
IEEE-NEMS 2014, Hawaii, USA (2014-04-13 - 2014-04-16), Piscataway, NJ, USA
Page Views
137