First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

Conference paper (2014)

Authors

F. Buja Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
J. Kokorian Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
AV Sumant Argonne National Laboratory
W.M. van Spengen Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Department
Precision and Microsystems Engineering
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Published Date

2014

Language

English

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Department

Precision and Microsystems Engineering