Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests

Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators

Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation