Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests

Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators

First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation