Nitrogen incorporated ultrananocrystalline diamond thermal actuators: design, fabrication and actuation
Conference Paper
(2013)
Author(s)
F. Buja (TU Delft - Micro and Nano Engineering)
AV Sumant (External organisation)
W.M. van Spengen (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1109/Transducers.2013.6627277
To reference this document use:
https://resolver.tudelft.nl/uuid:ba78bed5-c41e-4547-bb0d-1a049e8bfe24
More Info
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Publication Year
2013
Language
English
Research Group
Micro and Nano Engineering
Bibliographical Note
harvest@en
Pages (from-to)
2349-2352
ISBN (print)
978-1-4673-5981-8
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