Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices
Journal Article
(2015)
Author(s)
F. Buja (TU Delft - Micro and Nano Engineering)
J. Kokorian (TU Delft - Micro and Nano Engineering)
AV Sumant (Argonne National Laboratory)
W. Merlijn van Spengen (TU Delft - Micro and Nano Engineering)
Department
Precision and Microsystems Engineering
DOI related publication
https://doi.org/10.1016/j.diamond.2015.02.008
To reference this document use:
https://resolver.tudelft.nl/uuid:f0fd6ff0-14e5-4404-a473-3c44e4dfc03f
More Info
expand_more
expand_more
Publication Year
2015
Language
English
Department
Precision and Microsystems Engineering
Volume number
55
Pages (from-to)
22-31
No files available
Metadata only record. There are no files for this record.