Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices
Journal Article
(2015)
Authors
F. Buja (TU Delft - Micro and Nano Engineering)
Jaap Kokorian (TU Delft - Micro and Nano Engineering)
AV Sumant (Argonne National Laboratory)
Merlijn van Spengen (TU Delft - Micro and Nano Engineering)
Department
Precision and Microsystems Engineering
To reference this document use:
https://doi.org/10.1016/j.diamond.2015.02.008
TU Delft Repository resolver:
https://resolver.tudelft.nl/f0fd6ff0-14e5-4404-a473-3c44e4dfc03f
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Publication Year
2015
Language
English
Department
Precision and Microsystems Engineering
Volume number
55
Pages (from-to)
22-31
DOI:
https://doi.org/10.1016/j.diamond.2015.02.008
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