Studies on measuring surface adhesion between sidewalls in boron doped ultrananocrystalline diamond based microelectromechanical devices

Journal article (2015)

Authors

F. Buja Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
J. Kokorian Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
AV Sumant Argonne National Laboratory
W.M. van Spengen Micro and Nano Engineering - Mechanical, Maritime and Materials Engineering
Department
Precision and Microsystems Engineering
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Published Date

2015

Language

English

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Department

Precision and Microsystems Engineering