Observation of a carbon-based protective layer on the sidewalls of boron doped ultrananocrystalline diamond-based MEMS during in situ tribotests
Journal Article
(2015)
Author(s)
F Buja (TU Delft - Micro and Nano Engineering)
J. Kokorian (TU Delft - Micro and Nano Engineering)
R Gulotty (Argonne National Laboratory)
AV Sumant (Argonne National Laboratory)
W.M. van Spengen (TU Delft - Micro and Nano Engineering)
Department
Precision and Microsystems Engineering
DOI related publication
https://doi.org/10.1088/0960-1317/25/12/125020
To reference this document use:
https://resolver.tudelft.nl/uuid:bd2d92f2-8e3c-4102-ae80-1e285f911d6f
More Info
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Publication Year
2015
Language
English
Department
Precision and Microsystems Engineering
Volume number
25
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