Electrically conducting ultrananocrystalline diamond for the development of a next generation of micro-actuators
Journal Article
(2014)
Author(s)
F. Buja (TU Delft - Micro and Nano Engineering)
AV Sumant (Argonne National Laboratory)
J. Kokorian (TU Delft - Micro and Nano Engineering)
Merlijn van Spengen (TU Delft - Micro and Nano Engineering)
Department
Precision and Microsystems Engineering
DOI related publication
https://doi.org/10.1016/j.sna.2014.04.042
To reference this document use:
https://resolver.tudelft.nl/uuid:cf10ca74-dc27-4885-b7f3-ec7a98175c24
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Publication Year
2014
Language
English
Department
Precision and Microsystems Engineering
Volume number
214
Pages (from-to)
259-266
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