Morphological Classification of Hybrid Microsystems Assembly
Conference Paper
(2006)
Author(s)
I Kurniawan (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
Marian Bartek (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Research Group
Micro and Nano Engineering
To reference this document use:
https://resolver.tudelft.nl/uuid:aaa7dfcc-9248-4a7a-9b25-f21871ae7067
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Publication Year
2006
Research Group
Micro and Nano Engineering
Pages (from-to)
133-147
ISBN (print)
0-387-31276-5
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