Metal patterning on high topography surface for 3D RF devices fabrication
Journal Article
(2004)
Author(s)
NP Pham (TU Delft - Electronic Components, Technology and Materials)
E Boellaard (TU Delft - Electronic Components, Technology and Materials)
W.H.A. Wien (TU Delft - Electronic Components, Technology and Materials)
LDM van den Brekel (External organisation)
JN Burghartz (TU Delft - Old - EWI Ch. Integrated Sensing Devices)
Pasqualina M Sarro (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:ab87f7d3-0078-4ad9-aae9-32d94aaeece6
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Publication Year
2004
Research Group
Electronic Components, Technology and Materials
Volume number
115
Pages (from-to)
557-562
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