Epitaxial arsenic doping of Si BJT collectors
Conference Paper
(1999)
Author(s)
WD van Noort (TU Delft - Electronic Components, Technology and Materials)
L.K. Nanver (TU Delft - Electronic Components, Technology and Materials)
JW Slotboom (TU Delft - Electronic Components, Technology and Materials)
Research Group
Electronic Components, Technology and Materials
To reference this document use:
https://resolver.tudelft.nl/uuid:ac5e18c6-e6cf-4709-837d-76c04741e926
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Publication Year
1999
Research Group
Electronic Components, Technology and Materials
Pages (from-to)
747-752
ISBN (print)
90-73461-18-9
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