3-D silicon carbide surface micromachined accelerometer compatible with CMOS processing
Conference Paper
(2008)
Author(s)
L Pakula (TU Delft - Electronic Instrumentation)
H Yang (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:ac78463d-3098-4229-8b51-253d6fac484e
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Publication Year
2008
Research Group
Electronic Instrumentation
Pages (from-to)
227-230
ISBN (print)
978-1-4244-2325-5
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