Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]

Ashruf, Colin; French, P. J.; Sarro, P. M.; Kelly, JJ; Bressers, PMMC

Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]

Journal article (1998)

Authors

Colin Ashruf Electronic Instrumentation

P. J. French Electronic Instrumentation

P. M. Sarro Electronic Components, Technology and Materials

JJ Kelly External organisation

PMMC Bressers External organisation

Research Group

Electronic Instrumentation

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Published Date

1998

Language

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Research Group

Electronic Instrumentation

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