Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]

Journal article (1998)

Authors

CMA Ashruf Electronic Instrumentation - EEMCS
P.J. French Electronic Instrumentation - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
JJ Kelly External organisation
PMMC Bressers External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

1998

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation