Electrochemical etch stop engineering for bulk micromachining [ niet eerder opgevoerd ]
Journal Article
(1998)
Author(s)
CMA Ashruf (TU Delft - Electronic Instrumentation)
Paddy French (TU Delft - Electronic Instrumentation)
Lina Sarro (TU Delft - Electronic Components, Technology and Materials)
JJ Kelly (External organisation)
PMMC Bressers (External organisation)
Research Group
Electronic Instrumentation
To reference this document use:
https://resolver.tudelft.nl/uuid:ac839626-8cf6-46cd-b989-5de461428a8e
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Publication Year
1998
Research Group
Electronic Instrumentation
Issue number
8
Volume number
1998
Pages (from-to)
595-612
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