Waveguide-Based Multi-Band Mid-IR Absorption Spectroscopy on Water-Containing Biofuel
M. Ghaderi (TU Delft - Electrical Engineering, Mathematics and Computer Science)
G. Wang (TU Delft - Electrical Engineering, Mathematics and Computer Science)
J.H. Visser (Ford Motor Company)
R.F. Wolffenbuttel (TU Delft - Electrical Engineering, Mathematics and Computer Science)
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Abstract
Silicon waveguide structures with SiO<inf>2</inf> cladding and tapered on-chip couplers are fabricated on Si wafers for use in water-containing biofuel composition measurement in the 2.4- 2.6 μm respectively 3.5-3.8 μm water and ethanol dominated absorption bands.