Waveguide-Based Multi-Band Mid-IR Absorption Spectroscopy on Water-Containing Biofuel

Conference paper (2018)

Authors

M. Ghaderi Electronic Instrumentation - EEMCS
G. Wang Electronic Instrumentation - EEMCS
Jaco Visser Ford Motor Company
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
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Published Date

2018

Language

English

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation

Abstract

Silicon waveguide structures with SiO<inf>2</inf> cladding and tapered on-chip couplers are fabricated on Si wafers for use in water-containing biofuel composition measurement in the 2.4- 2.6 μm respectively 3.5-3.8 μm water and ethanol dominated absorption bands.