A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas
Conference Paper
(2011)
Author(s)
G. de Graaf (TU Delft - Electronic Instrumentation)
H.W. Wu (TU Delft - Electronic Instrumentation)
R. F. Wolffenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1109/ESIME.2011.5765809
To reference this document use:
https://resolver.tudelft.nl/uuid:ad8895d3-3319-4f0e-8813-8b7c0d0f8a45
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Publication Year
2011
Language
English
Research Group
Electronic Instrumentation
Pages (from-to)
1-5
ISBN (print)
978-1-4577-0107-8
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