A model for static and dynamic thermal analysis of thin film MEMS structures including the thermal conductivity of the surrounding gas

Conference paper (2011)

Authors

Ger De Graaf Electronic Instrumentation
HW Wu Electronic Instrumentation
Reinoud Wolfenbuttel Electronic Instrumentation
Research Group
Electronic Instrumentation
More Info
expand_more

Published Date

2011

Language

English

Reuse Rights

Other than for strictly personal use, it is not permitted to download, forward or distribute the text or part of it, without the consent of the author(s) and/or copyright holder(s), unless the work is under an open content license such as Creative Commons.

Research Group

Electronic Instrumentation

No files available

Metadata only record. There are no files for this conference paper.