High-speed computational imaging with path-corrected fly-scan ptychography

Conference Paper (2025)
Author(s)

Augustas Karpavičius (TU Delft - ImPhys/Witte group, Vrije Universiteit Amsterdam, Advanced Research Center for Nanolithography, Amsterdam)

Matthias Gouder (Vrije Universiteit Amsterdam, Advanced Research Center for Nanolithography)

Jacob Seifert (Advanced Research Center for Nanolithography, Vrije Universiteit Amsterdam)

Aaron Rivera Sanchez (Advanced Research Center for Nanolithography, Amsterdam, TU Delft - ImPhys/Witte group)

Stefan Witte (Advanced Research Center for Nanolithography, TU Delft - ImPhys/Witte group)

Research Group
ImPhys/Witte group
DOI related publication
https://doi.org/10.1109/CLEO/EUROPE-EQEC65582.2025.11109582
More Info
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Publication Year
2025
Language
English
Research Group
ImPhys/Witte group
Bibliographical Note
Green Open Access added to TU Delft Institutional Repository as part of the Taverne amendment. More information about this copyright law amendment can be found at https://www.openaccess.nl. Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.@en
Publisher
IEEE
ISBN (electronic)
9798331512521
Reuse Rights

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Abstract

Ptychography is a computational imaging technique that enables the reconstruction of the amplitude and phase of an object and an illumination field using a series of recorded diffraction patterns [1]. Compared to conventional imaging techniques, ptychographic measurements offer more comprehensive information about the reconstructed object without requiring high-quality lenses, while also accommodating correction of experimental imperfections such as distance inaccuracies, angular misalignments, and other experimental errors. However, as ptychography is not a single-shot measurement technique, it is time-consuming, with a significant part of the measurement time attributed to the scanning process. Such mechanical scanning is inherently slow due to the acceleration limitations of the sample stage and the time required for stabilization [2].

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