High-speed computational imaging with path-corrected fly-scan ptychography
Augustas Karpavičius (TU Delft - ImPhys/Witte group, Vrije Universiteit Amsterdam, Advanced Research Center for Nanolithography, Amsterdam)
Matthias Gouder (Vrije Universiteit Amsterdam, Advanced Research Center for Nanolithography)
Jacob Seifert (Advanced Research Center for Nanolithography, Vrije Universiteit Amsterdam)
Aaron Rivera Sanchez (Advanced Research Center for Nanolithography, Amsterdam, TU Delft - ImPhys/Witte group)
Stefan Witte (Advanced Research Center for Nanolithography, TU Delft - ImPhys/Witte group)
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Abstract
Ptychography is a computational imaging technique that enables the reconstruction of the amplitude and phase of an object and an illumination field using a series of recorded diffraction patterns [1]. Compared to conventional imaging techniques, ptychographic measurements offer more comprehensive information about the reconstructed object without requiring high-quality lenses, while also accommodating correction of experimental imperfections such as distance inaccuracies, angular misalignments, and other experimental errors. However, as ptychography is not a single-shot measurement technique, it is time-consuming, with a significant part of the measurement time attributed to the scanning process. Such mechanical scanning is inherently slow due to the acceleration limitations of the sample stage and the time required for stabilization [2].