Evaluation of an empirical model to estimate and optimize mechanical properties of pecvd sic films

Journal article (2005)

Authors

HTM Pham Electronic Components, Technology and Materials - EEMCS
C.R. de Boer Electronic Components, Technology and Materials - EEMCS
C.C.G. Visser Electronic Components, Technology and Materials - EEMCS
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2005

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials