Capacitive MEMS accelerometers testing mechanism for auto-calibration and long-term diagnostics

Conference paper (2007)

Authors

LA Rocha Electronic Instrumentation - EEMCS
L Mol Electronic Instrumentation - EEMCS
E Cretu External organisation
R.F. Wolffenbuttel Electronic Instrumentation - EEMCS
J Machado da silva External organisation
Research Group
Electronic Instrumentation (EEMCS) (TU Delft)
Elektrotechniek Techniek
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Published Date

2007

Language

Undefined/Unknown

Reuse Rights

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Instrumentation