Minimizing stress in large-area surface micromachined perforated membranes with slits
Journal Article
(2015)
Author(s)
M. Ghaderi (TU Delft - Electronic Instrumentation)
N.P. Ayerden (TU Delft - Electronic Instrumentation)
G. Graaf (TU Delft - Electronic Instrumentation)
Reinoud Wolfenbuttel (TU Delft - Electronic Instrumentation)
Research Group
Electronic Instrumentation
DOI related publication
https://doi.org/10.1088/0960-1317/25/7/074010
To reference this document use:
https://resolver.tudelft.nl/uuid:b3517aac-0c66-47fe-981a-a5a89bda7649
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Publication Year
2015
Language
English
Research Group
Electronic Instrumentation
Issue number
7
Volume number
25
Pages (from-to)
1-9
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