High speed anisotropic dry etching of CoNbZr for next generation magnetic recording.
Conference Paper
(2000)
Author(s)
MSP Andriesse (TU Delft - QN/Kavli Nanolab Delft)
T Zijlstra (TU Delft - QN/Kavli Nanolab Delft)
Emile van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
To reference this document use:
https://resolver.tudelft.nl/uuid:b399c032-169f-4595-9ec8-7fec6ff954d4
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Publication Year
2000
Research Group
QN/Kavli Nanolab Delft
Pages (from-to)
3462-3466
ISBN (print)
1-56396-969-6
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