Lossless Integration of Piezoelectric Transducers in CMOS Technology

Design and optimization of the microfabrication process

Master thesis (2023)

Authors

E. Puchol Morejón Mechanical Engineering

Contributors

T.M. Lopes Marta da Costa Bio-Electronics - EEMCS (supervisor 1)
Faculty
Mechanical Engineering
Copyright: © 2023 Eduardo Puchol Morejón
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Published Date

25-10-2023

Language

English

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Faculty

Mechanical Engineering