Lossless Integration of Piezoelectric Transducers in CMOS Technology

Design and optimization of the microfabrication process

Master Thesis (2023)

Authors

E. Puchol Morejón (TU Delft - Mechanical Engineering)

Supervisors

T. Costa (TU Delft - Bio-Electronics)

Faculty

Mechanical Engineering, Mechanical Engineering

Microfabrication Piezoelectric transducers Copper electroplating Through-vias integration Air-backing technology

To reference this document use:

https://resolver.tudelft.nl/b639b85b-a58f-4d29-9228-240d971a8c3a

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Publication Year

2023

Language

English

Graduation Date

25-10-2023

Awarding Institution

Delft University of Technology

Programme

Biomedical Engineering

Faculty

Mechanical Engineering, Mechanical Engineering

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