Fabrication and characterization of suspended beam structures for SiO2 photonic MEMS
Journal Article
(2015)
Author(s)
TJ Peters (TU Delft - Micro and Nano Engineering)
Marcel Tichem (TU Delft - Micro and Nano Engineering)
Research Group
Micro and Nano Engineering
DOI related publication
https://doi.org/10.1088/0960-1317/25/10/105003
To reference this document use:
https://resolver.tudelft.nl/uuid:b64a9fc2-dfe3-40e3-a06b-ca0baa2e13ac
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Publication Year
2015
Language
English
Research Group
Micro and Nano Engineering
Issue number
10
Volume number
25
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