Approaching the resolution limit of nanometer-scale electron beam-induced deposition
Journal Article
(2005)
Author(s)
W.F. van Dorp (TU Delft - ImPhys/Charged Particle Optics)
B van Someren (TU Delft - ImPhys/Charged Particle Optics)
C. W. Hagen (TU Delft - ImPhys/Charged Particle Optics)
P. Kruit (TU Delft - ImPhys/Charged Particle Optics)
P. Crozier (External organisation)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:b680d5fe-27ea-41f9-9b55-ac08f8622c24
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Publication Year
2005
Research Group
ImPhys/Charged Particle Optics
Issue number
7
Volume number
5
Pages (from-to)
1303-1307
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