Optical waveguides and beam splitters using low-loss aluminum oxide for visible-wavelength photonics applications

Journal Article (2025)
Author(s)

Takuto Yamaguchi (Fujitsu Limited)

Naoki Fushimi (Fujitsu Limited)

Masaharu Hida (Fujitsu Limited)

Hirokazu Hosoi (Fujitsu Limited)

Manabu Ohtomo (Fujitsu Limited)

Tetsuya Miyatake (Fujitsu Limited)

Shoichi Miyahara (Fujitsu Limited)

Toshiyuki Miyazawa (Fujitsu Limited)

Kenichi Kawaguchi (Fujitsu Limited)

Ryoichi Ishihara (TU Delft - QID/Ishihara Lab, TU Delft - Electrical Engineering, Mathematics and Computer Science, TU Delft - QuTech Advanced Research Centre)

Shintaro Sato (Fujitsu Limited)

Research Institute
QuTech Advanced Research Centre
DOI related publication
https://doi.org/10.35848/1347-4065/adb166 Final published version
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Publication Year
2025
Language
English
Research Institute
QuTech Advanced Research Centre
Bibliographical Note
Green Open Access added to TU Delft Institutional Repository 'You share, we take care!' - Taverne project https://www.openaccess.nl/en/you-share-we-take-care Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.
Journal title
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers
Issue number
2
Volume number
64
Article number
02SP32
Downloads counter
246
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Abstract

Low-loss visible-light photonic circuits are crucial for high-performance photonic quantum processors. By using aluminum oxide (Al2O3) for its low visible-light absorption, we achieved waveguides exhibiting an exceptionally low propagation loss (1.39 dB/cm for the transverse electric mode) at red-light wavelengths. Directional coupler beam splitters fabricated using this platform exhibited good controllability of the optical splitting ratios. Furthermore, we fabricated a half beam splitter, which is an essential component of entangled photon generation in quantum optics. These results represent a significant advance toward developing low-loss photonic circuits, paving the way for improved performance in photonic quantum processors.

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