Mechanical Properties of Polymer Dielectric Films at Elevated Temperatures
M van Soestbergen (TU Delft - Computational Design and Mechanics)
LJ Ernst (TU Delft - Computational Design and Mechanics)
Kaspar M B Jansen (TU Delft - Computational Design and Mechanics)
Willem Dirk van van Driel (TU Delft - Dynamics of Micro and Nano Systems)
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Abstract
The miniaturization of microelectronics has led to the use of polmer dielectric films with a thickness less than a micrometer. The use of polymer dielectric films has introduced new failure modes. To have a better understanding of these failures, knowledge of the mechanical properties is necessary.
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