Mechanical Properties of Polymer Dielectric Films at Elevated Temperatures
Conference Paper
(2006)
Author(s)
M. van Soestbergen (TU Delft - Computational Design and Mechanics)
L.J. Ernst (TU Delft - Computational Design and Mechanics)
K.M.B. Jansen (TU Delft - Computational Design and Mechanics)
W.D. van Driel (TU Delft - Dynamics of Micro and Nano Systems)
Research Group
Computational Design and Mechanics
To reference this document use:
https://resolver.tudelft.nl/uuid:b727afc2-b565-49e0-a105-213ed2c590d0
More Info
expand_more
expand_more
Publication Year
2006
Research Group
Computational Design and Mechanics
Pages (from-to)
664-667
ISBN (print)
1-4244-0620-X
Abstract
The miniaturization of microelectronics has led to the use of polmer dielectric films with a thickness less than a micrometer. The use of polymer dielectric films has introduced new failure modes. To have a better understanding of these failures, knowledge of the mechanical properties is necessary.
No files available
Metadata only record. There are no files for this record.