Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing
Conference Paper
(2014)
Author(s)
Sangeetha Hari (TU Delft - ImPhys/Charged Particle Optics)
Cornelis Wouter Hagen (TU Delft - ImPhys/Charged Particle Optics)
T. Verduin (TU Delft - ImPhys/Charged Particle Optics)
P Kruit (TU Delft - ImPhys/Charged Particle Optics)
Research Group
ImPhys/Charged Particle Optics
To reference this document use:
https://resolver.tudelft.nl/uuid:b89e1300-299a-42e0-82b4-e33c9d2a7ed5
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Publication Year
2014
Language
English
Research Group
ImPhys/Charged Particle Optics
Pages (from-to)
1-4
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