Advanced dry etching for next generation thin film heads for magnetic recording.
Report
(1999)
Author(s)
MSP Andriesse (TU Delft - QN/Kavli Nanolab Delft)
E.W.J.M. van der Drift (TU Delft - QN/Kavli Nanolab Delft)
Research Group
QN/Kavli Nanolab Delft
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Publication Year
1999
Research Group
QN/Kavli Nanolab Delft
Bibliographical Note
31 October@en
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