Mechanical and structural properties of in-situ doped PECVD SiC layers for post-processing surface micromachining.

Conference paper (2001)

Authors

HTM Pham Electronic Components, Technology and Materials - EEMCS
CR de Boer External organisation
C. Kwakernaak OLD Virtual Materials and Mechanics
W.G. Sloof OLD Virtual Materials and Mechanics
Pasqualina M Sarro Electronic Components, Technology and Materials - EEMCS
Research Group
Electronic Components, Technology and Materials (EEMCS) (TU Delft)
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Published Date

2001

Language

Undefined/Unknown

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Faculty

Electrical Engineering, Mathematics and Computer Science

Department

Microelectronics

Research Group

Electronic Components, Technology and Materials