Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films
Journal Article
(2002)
Author(s)
N Iossad (TU Delft - QN/Fysics of NanoElectronics)
N.M. van der Pers (TU Delft - OLD Virtual Materials and Mechanics)
S Grachev (TU Delft - OLD Virtual Materials and Mechanics)
VV Roddatis (External organisation)
BD Jackson (TU Delft - QN/Fysics of NanoElectronics)
SN Polyakov (External organisation)
PN Dmitriev (External organisation)
TM Klapwijk (TU Delft - QN/Fysics of NanoElectronics)
Research Group
QN/Fysics of NanoElectronics
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https://resolver.tudelft.nl/uuid:b99ca054-231b-472c-9a60-8ee921d2d7b8
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Publication Year
2002
Research Group
QN/Fysics of NanoElectronics
Issue number
9
Volume number
92
Pages (from-to)
4999-5005
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