Texture formation in sputter-deposited (Nb0.7,Ti0.3)N thin films

Journal article (2002)

Authors

N Iossad QN/Fysics of NanoElectronics
N.M. van der Pers OLD Virtual Materials and Mechanics
S Grachev OLD Virtual Materials and Mechanics
VV Roddatis External organisation
BD Jackson QN/Fysics of NanoElectronics
SN Polyakov External organisation
PN Dmitriev External organisation
T.M. Klapwijk QN/Fysics of NanoElectronics
Research Group
QN/Fysics of NanoElectronics
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Published Date

2002

Language

Undefined/Unknown

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Research Group

QN/Fysics of NanoElectronics