Simulation and characterization of a high-sensitive micro-opto-mechanical Microphone

Conference paper (2018)

Authors

H. Gao IMEC

C. H. Huang IMEC

W.J. Westerveld IMEC

R. Haouari IMEC

B. Troia IMEC

F. Verhaegen IMEC

Roelof Jansen IMEC

B. Figeys IMEC

X. Rottenberg IMEC

V. Rochus IMEC

Affiliation

External organisation

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Published Date

2018

Language

English

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Abstract

Micro-opto-mechanical Microphone (MOMM) based on integrated optical Mach-Zehnder interferometers (MZI) are promising for future application in medical environments. However, the design of next generation MOMM systems on chip remains challenging due to the intrinsic multi-physics characteristics related to acoustic, mechanical, optical and electrical effects. We therefore developed a methodology composed of acoustic, mechanic, optical, and electronic sections for fast design of high performance MOMM systems. The feasibility has been demonstrated as the operational characteristics of the fabricated MOMM (i.e. resonance frequency, dynamic range, the sensitivity and SNR) align well with the measured references.